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Advances in pulsed-laser-deposited AIN thin films for high-temperature capping, device passivation, and piezoelectric-based RF MEMS/NEMS resonator applications
S. S. Hullavarad, R. D. Vispute, B. Nagaraj, V. N. Kulkarni, S. Dhar, T. Venkatesan, K. A. Jones, M. Derenge, T. Zheleva, M. H. Ervin, A. Lelis, C. J. Scozzie, D. Habersat, A. E. Wickenden, L. J. CurrVolume:
35
Year:
2006
Language:
english
Pages:
18
DOI:
10.1007/s11664-006-0138-5
File:
PDF, 643 KB
english, 2006