Novel abrasive-free planarization of 4H-SiC (0001) using...

Journal of Electronic Materials 2006 Vol. 35; Iss. 8

Novel abrasive-free planarization of 4H-SiC (0001) using catalyst

Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura, Kenta Arima, Akihisa Kubota, Keita Yagi, Junji Murata, Kazuto Yamauch
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Volume:
35
Year:
2006
Language:
english
Pages:
1
DOI:
10.1007/s11664-006-0218-6
File:
PDF, 168 KB
english, 2006
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