Hybrid deposition of piezoelectric((11ar 20))MgxZn1−xO...

Journal of Electronic Materials 2006 Vol. 35; Iss. 6

Hybrid deposition of piezoelectric((11ar 20))MgxZn1−xO (0≤x≤0.3) on((01ar 12))R-sapphire substrates using RF sputtering and MOCVDR-sapphire substrates using RF sputtering and MOCVD

Gaurav Saraf, Ying Chen, Theo Siegrist, Leszek S. Wielunski, Yicheng Lu
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Volume:
35
Year:
2006
Language:
english
Pages:
5
DOI:
10.1007/s11664-006-0259-x
File:
PDF, 207 KB
english, 2006
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