Al- and Al:In-Doped ZnO Thin Films Deposited by RF...

Journal of Electronic Materials 2008 / 09 Vol. 37; Iss. 9

Al- and Al:In-Doped ZnO Thin Films Deposited by RF Magnetron Sputtering for Spacecraft Charge Mitigation

C. Lennon, R. Kodama, Y. Chang, S. Sivananthan, M. Deshpande
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Volume:
37
Language:
english
Pages:
5
DOI:
10.1007/s11664-008-0436-1
Date:
September, 2008
File:
PDF, 379 KB
english, 2008
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