Characterization of Self-Formed Ti-Rich Interface Layers in...

Journal of Electronic Materials 2008 / 08 Vol. 37; Iss. 8

Characterization of Self-Formed Ti-Rich Interface Layers in Cu(Ti)/Low-kSamples

Kazuyuki Kohama, Kazuhiro Ito, Susumu Tsukimoto, Kenichi Mori, Kazuyoshi Maekawa, Masanori Murakami
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Volume:
37
Language:
english
Pages:
10
DOI:
10.1007/s11664-008-0482-8
Date:
August, 2008
File:
PDF, 847 KB
english, 2008
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