Simultaneous Formation of Ni/Al Ohmic Contacts to Bothn-...

Journal of Electronic Materials 2008 / 11 Vol. 37; Iss. 11

Simultaneous Formation of Ni/Al Ohmic Contacts to Bothn- andp-Type 4H-SiC

Kazuhiro Ito, Toshitake Onishi, Hidehisa Takeda, Kazuyuki Kohama, Susumu Tsukimoto, Mitsuru Konno, Yuya Suzuki, Masanori Murakami
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Volume:
37
Language:
english
Pages:
7
DOI:
10.1007/s11664-008-0525-1
Date:
November, 2008
File:
PDF, 413 KB
english, 2008
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