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Simultaneous Formation of Ni/Al Ohmic Contacts to Bothn- andp-Type 4H-SiC
Kazuhiro Ito, Toshitake Onishi, Hidehisa Takeda, Kazuyuki Kohama, Susumu Tsukimoto, Mitsuru Konno, Yuya Suzuki, Masanori MurakamiVolume:
37
Language:
english
Pages:
7
DOI:
10.1007/s11664-008-0525-1
Date:
November, 2008
File:
PDF, 413 KB
english, 2008