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Heteroepitaxial 3C-SiC on Si with Various Carbonization Process Conditions
Byeung C. Kim, John Coy, Sangho Kim, Michael A. CapanoVolume:
38
Language:
english
Pages:
5
DOI:
10.1007/s11664-008-0614-1
Date:
April, 2009
File:
PDF, 349 KB
english, 2009