Effects of Cathode Voltage Pulse Width in High Power...

Coatings 2020 / 06 Vol. 10; Iss. 6

Effects of Cathode Voltage Pulse Width in High Power Impulse Magnetron Sputtering on the Deposited Chromium Thin Films

Kuo, Chin-Chiuan, Lin, Chun-Hui, Lin, Yu-Tse, Chang, Jing-Tang
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Volume:
10
Journal:
Coatings
DOI:
10.3390/coatings10060542
Date:
June, 2020
File:
PDF, 5.52 MB
2020
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