Improved Gettering Efficiency of Ni from Nickel-Mediated...

Journal of Electronic Materials 2009 / 06 Vol. 38; Iss. 6

Improved Gettering Efficiency of Ni from Nickel-Mediated Crystallization Silicon Using Phosphorus-Doped Amorphous Silicon

Bau-Ming Wang, Yewchung Sermon Wu
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Volume:
38
Language:
english
Pages:
5
DOI:
10.1007/s11664-009-0750-2
Date:
June, 2009
File:
PDF, 336 KB
english, 2009
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