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Rutherford Backscattering Spectrometry Analysis of Self-Formed Ti-Rich Interface Layer Growth in Cu(Ti)/Low-kSamples
Kazuyuki Kohama, Kazuhiro Ito, Kenichi Mori, Kazuyoshi Maekawa, Yasuharu Shirai, Masanori MurakamiVolume:
38
Language:
english
Pages:
8
DOI:
10.1007/s11664-009-0843-y
Date:
September, 2009
File:
PDF, 638 KB
english, 2009