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Structural Properties of AlN Grown on Sapphire at Plasma Self-Heating Conditions Using Reactive Magnetron Sputter Deposition
Hui-Chan Seo, Ivan Petrov, Kyekyoon KimVolume:
39
Language:
english
Pages:
6
DOI:
10.1007/s11664-010-1275-4
Date:
August, 2010
File:
PDF, 527 KB
english, 2010