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Integrated UV-based Photo microreactor-distillation Technology Toward Process Intensification of Continuous Ultra-high-purity Electronic-grade Silicon Tetrachloride Manufacture
WAN, Ye, GUO, Wen-hui, XIAO, Jin, YAN, Da-zhou, ZHAO, Xiong, GUO, Shu-hu, LIU, Jian-hua, ZHONG, Qi-fan, YANG, Tao, ZHAO, Yu, CHANG, Xin, GAO, XinJournal:
Chinese Journal of Chemical Engineering
DOI:
10.1016/j.cjche.2020.06.023
Date:
June, 2020
File:
PDF, 5.17 MB
2020