Improved Electrical Performance and Reliability of Poly-Si...

Journal of Electronic Materials 2011 / 06 Vol. 40; Iss. 6

Improved Electrical Performance and Reliability of Poly-Si TFTs Fabricated by Drive-In Nickel-Induced Crystallization with Chemical Oxide Layer

Ming-Hui Lai, YewChung Sermon Wu, Chih-Pang Chang
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Volume:
40
Language:
english
Pages:
6
DOI:
10.1007/s11664-011-1522-3
Date:
June, 2011
File:
PDF, 571 KB
english, 2011
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