Study of columnar growth, texture development and...

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Surface and Coatings Technology 2020 / 6

Study of columnar growth, texture development and wettability of reactively sputter-deposited TiN, ZrN and HfN thin films at glancing angle incidence

Mareus, Rubenson, Mastail, Cédric, Anğay, Fırat, Brunetière, Noël, Abadias, Gregory
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Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.126130
Date:
June, 2020
File:
PDF, 2.14 MB
2020
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