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Tribological study of hafnium dioxide and aluminium oxide films grown by atomic layer deposition on glass substrate
Pietruszka, R., Witkowski, B.S., Zimowski, S., Stapinski, T., Godlewski, M.Volume:
709
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.138191
Date:
September, 2020
File:
PDF, 1.41 MB
2020