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In-situmonitoring and control for MOCVD growth of AlGaAs and InGaAs
A. Kussmaul, S. Vernon, P. C. Colter, R. Sudharsanan, A. Mastrovito, K. J. Linden, N. H. Karam, N. H. Karam, S. C. Warnick, M. A. DahlehVolume:
26
Year:
1997
Language:
english
Pages:
9
DOI:
10.1007/s11664-997-0011-1
File:
PDF, 467 KB
english, 1997