![](/img/cover-not-exists.png)
Laser-induced direct etching of GaAs using chlorofluorocarbon (CFC) alternative gases
Moo-Sung Kim, Cheon Lee, Se Ki Park, Won Chel Choi, Eun Kyu Kim, Seong-Il Kim, Byoung Sung Ahn, Suk-Ki MinVolume:
26
Language:
english
Pages:
4
DOI:
10.1007/s11664-997-0115-7
Date:
May, 1997
File:
PDF, 753 KB
english, 1997