Ion implantation doping of OMCVD grown GaN
A. Edwards, Mulpuri V. Rao, B. Molnar, A. E. Wickenden, W. Holland, P. H. ChiVolume:
26
Language:
english
Pages:
6
DOI:
10.1007/s11664-997-0174-9
Date:
March, 1997
File:
PDF, 583 KB
english, 1997