Effect of substrate bias on microstructure of epitaxial...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 07 Vol. 38; Iss. 4

Effect of substrate bias on microstructure of epitaxial film grown by HiPIMS: An atomistic simulation

Kateb, Movaffaq, Gudmundsson, Jon Tomas, Ingvarsson, Snorri
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000233
Date:
July, 2020
File:
PDF, 5.33 MB
2020
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