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Influence of water absorption by silicate glass on the strains in passivated Al conductor lines
W. -M. Kuschke, H. -D. Carstanjen, N. Pazarkas, D. -W. Plachke, E. ArztVolume:
27
Year:
1998
Language:
english
Pages:
5
DOI:
10.1007/s11664-998-0109-0
File:
PDF, 178 KB
english, 1998