Effect of dissolved oxygen on thermal oxidation in Ta2O5/Ta...

Effect of dissolved oxygen on thermal oxidation in Ta2O5/Ta sandwiches

Yu. Pozdeev-Freeman, A. Gladkikh, M. Karpovski, A. Palevski
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Volume:
27
Year:
1998
Language:
english
Pages:
4
DOI:
10.1007/s11664-998-0159-3
File:
PDF, 625 KB
english, 1998
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