Effect of dissolved oxygen on thermal oxidation in Ta2O5/Ta sandwiches
Yu. Pozdeev-Freeman, A. Gladkikh, M. Karpovski, A. PalevskiVolume:
27
Year:
1998
Language:
english
Pages:
4
DOI:
10.1007/s11664-998-0159-3
File:
PDF, 625 KB
english, 1998