Plasma immersion ion implantation for SOI synthesis: SIMOX...

Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut

Xiang Lu, S. Sundar Kumar Iyer, Jin Lee, Brian Doyle, Zhineng Fan, Paul K. Chu, Chenming Hu, Nathan W. Cheung
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Volume:
27
Year:
1998
Language:
english
Pages:
8
DOI:
10.1007/s11664-998-0164-6
File:
PDF, 1.17 MB
english, 1998
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