Analysis of the stress and interfacial reactions in...

Analysis of the stress and interfacial reactions in Pt/Ti/SiO2/Si for use with ferroelectric thin films

Lynnette D. Madsen, Louise Weaver, Henrik Ljungcrantz, Alison J. Clark
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Volume:
27
Year:
1998
Language:
english
Pages:
9
DOI:
10.1007/s11664-998-0171-7
File:
PDF, 3.06 MB
english, 1998
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