Rapid thermal annealing of zirconia films deposited by...

Journal of Electronic Materials 1990 Vol. 27; Iss. 2

Rapid thermal annealing of zirconia films deposited by spray pyrolysis

N. H. Beltrán, C. Balocchi, X. Errazu, R. E. Avila, G. Piderit
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Volume:
27
Year:
1990
Language:
english
Pages:
1
DOI:
10.1007/s11664-998-0196-y
File:
PDF, 446 KB
english, 1990
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