Micropipe and dislocation density reduction in 6H-SiC and...

Journal of Electronic Materials 1998 Vol. 27; Iss. 4

Micropipe and dislocation density reduction in 6H-SiC and 4H-SiC structures grown by liquid phase epitaxy

S. V. Rendakova, I. P. Nikitina, A. S. Tregubova, V. A. Dmitriev
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Volume:
27
Year:
1998
Language:
english
Pages:
4
DOI:
10.1007/s11664-998-0402-y
File:
PDF, 2.67 MB
english, 1998
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