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Effects of “fast” rapid thermal anneals on sub-keV boron and BF2ion implants
Daniel F. Downey, Scott W. Falk, Adam F. Bertuch, Steven D. MarcusVolume:
28
Year:
1999
Language:
english
Pages:
5
DOI:
10.1007/s11664-999-0119-6
File:
PDF, 157 KB
english, 1999