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Preparation of Silicon Carbide Coatings from Liquid Carbosilanes by Chemical Vapor Deposition
Bin Li, Changrui Zhang, Haifeng Hu, Yingbin Cao, Gongjin Qi, Rongjun LiuVolume:
16
Language:
english
Pages:
4
DOI:
10.1007/s11665-007-9154-8
Date:
December, 2007
File:
PDF, 356 KB
english, 2007