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Journal of Microelectromechanical Systems 2020

Frequency Tunable Surface Acoustic Wave Actuators for Adjustable Pitch Diffraction Grating

Frez, Clifford F., Coskun, M. Bulut, Scott, Valerie J., Wu, Yen-Hung, Fraeman, Abigail, Rais-Zadeh, Mina
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Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3000151
File:
PDF, 3.73 MB
2020
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