314 HRTEM Studies of Plastic Deformation in Silicon Wafers...

The Proceedings of the JSME Materials and Processing Conference (M&P) 2002 Vol. 10.1

314 HRTEM Studies of Plastic Deformation in Silicon Wafers due to Micro Indentation

Zarudi, I., Zou, J., Zhang, L. C.
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Volume:
10.1
Year:
2002
Journal:
The Proceedings of the JSME Materials and Processing Conference (M&P)
DOI:
10.1299/jsmeintmp.10.1.552
File:
PDF, 1.37 MB
2002
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