Control of an XY Nano-Positioning Table for a Compact...

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005 Vol. 2005.3

Control of an XY Nano-Positioning Table for a Compact Nano-Machine Tool(Precision positioning and control technology)

MAEDA, Guilherme Jorge, SATO, Kaiji, HASHIZUME, Hitoshi, SHINSHI, Tadahiko
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Volume:
2005.3
Year:
2005
Journal:
Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
DOI:
10.1299/jsmelem.2005.3.987
File:
PDF, 648 KB
2005
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