Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for...

Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS

Izawa, Yusaku, Tsurumi, Yosuke, Tanaka, Shuji, Fukushi, Hideyuki, Sueda, Keiichi, Nakata, Yoshiki, Esashi, Masayoshi, Miyanaga, Noriaki, Fujita, Masayuki
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Volume:
129
Year:
2009
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.129.63
File:
PDF, 1.20 MB
2009
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