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LARGE—A Plasma Torch for Surface Chemistry Applications and CVD Processes—A Status Report
Stephan Zimmermann, Eckart Theophile, Klaus Landes, Jochen ScheinVolume:
17
Language:
english
Pages:
6
DOI:
10.1007/s11666-008-9267-0
Date:
December, 2008
File:
PDF, 507 KB
english, 2008