A Rotating Ring Disk Study of Accelerators with Clï¼ and Brï¼ for Copper Damascene Electrodeposition
TRAN, Anh Van Nhat, HOANG, Ha Van, HIRATO, Tetsuji, KONDO, KazuoVolume:
69
Journal:
Journal of The Surface Finishing Society of Japan
DOI:
10.4139/sfj.69.352
Date:
August, 2018
File:
PDF, 2.39 MB
2018