Low-Mg out-diffusion of a normally off p-GaN gate...

Materials Science in Semiconductor Processing 2020 / 10 Vol. 117

Low-Mg out-diffusion of a normally off p-GaN gate high-electron-mobility transistor by using the laser activation technique

Chiu, Hsien-Chin, Liu, Chia-Hao, Kao, Hsuan-Ling, Wang, Hsiang-Chun, Huang, Chong-Rong, Chiu, Chao-Wei, Chen, Chih-Tien, Chang, Kuo-Jen
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Volume:
117
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105166
Date:
October, 2020
File:
PDF, 1.39 MB
2020
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