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A Novel Self-aligned and Maskless Process for Formation of Highly Uniform Arrays of Nanoholes and Nanopillars
Wei Wu, Dibyendu Dey, Omer G. Memis, Alex Katsnelson, Hooman MohseniVolume:
3
Language:
english
Pages:
5
DOI:
10.1007/s11671-008-9124-6
Date:
March, 2008
File:
PDF, 401 KB
english, 2008