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New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching
Chunxiao Cong, William Chandra Junus, Zexiang Shen, Ting YuVolume:
4
Language:
english
Pages:
5
DOI:
10.1007/s11671-009-9400-0
Date:
November, 2009
File:
PDF, 321 KB
english, 2009