Long stroke displacement measurement with reduced coupling...

Long stroke displacement measurement with reduced coupling error supporting high precision control of a beam flexure-based micro-stage

Lu, Shuaishuai, Yan, Peng, Zhang, Bei
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Volume:
91
Journal:
Review of Scientific Instruments
DOI:
10.1063/5.0009965
Date:
July, 2020
File:
PDF, 6.97 MB
2020
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