Comparison of material measures for areal surface...

Surface Topography: Metrology and Properties 2020 / 05 Vol. 8; Iss. 2

Comparison of material measures for areal surface topography measuring instrument calibration

Eifler, M, Hering, J, Seewig, J, Leach, R K, von Freymann, G, Hu, X, Dai, G
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Volume:
8
Journal:
Surface Topography: Metrology and Properties
DOI:
10.1088/2051-672X/ab92ae
Date:
May, 2020
File:
PDF, 9.21 MB
2020
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