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Berkovich Nanoindentation on AlN Thin Films
Sheng-Rui Jian, Guo-Ju Chen, Ting-Chun LinVolume:
5
Language:
english
Pages:
6
DOI:
10.1007/s11671-010-9582-5
Date:
June, 2010
File:
PDF, 383 KB
english, 2010