A Journey from Bulk MOSFET to 3 nm and Beyond

Transactions on Electrical and Electronic Materials 2020 / 7

A Journey from Bulk MOSFET to 3 nm and Beyond

Samal, Asharani, Tripathi, Suman Lata, Mohapatra, Sushanta Kumar
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Journal:
Transactions on Electrical and Electronic Materials
DOI:
10.1007/s42341-020-00222-y
Date:
July, 2020
File:
PDF, 2.34 MB
2020
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