Optimum design of a 740 mm-long lens mount for a large-area...

Optik 2020 / 04 Vol. 208

Optimum design of a 740 mm-long lens mount for a large-area and high-speed line beam proximity exposure

Lee, Changkyu, Ryu, Sang Gil, Oh, Je Hoon
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Volume:
208
Journal:
Optik
DOI:
10.1016/j.ijleo.2019.164058
Date:
April, 2020
File:
PDF, 1.59 MB
2020
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