Investigations of chemical and atomic composition of native...

Surface and Coatings Technology 2020 / 07 Vol. 394

Investigations of chemical and atomic composition of native oxide layers covering SI GaAs implanted with Xe ions

Tuan, P.L., Kulik, M., Nowicka-Scheibe, J., Żuk, J., Horodek, P., Khiem, L.H., Phuc, T.V., Anh, Nguyen Ngoc, Turek, M.
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Volume:
394
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.125871
Date:
July, 2020
File:
PDF, 1.05 MB
2020
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