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Investigations of chemical and atomic composition of native oxide layers covering SI GaAs implanted with Xe ions
Tuan, P.L., Kulik, M., Nowicka-Scheibe, J., Żuk, J., Horodek, P., Khiem, L.H., Phuc, T.V., Anh, Nguyen Ngoc, Turek, M.Volume:
394
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.125871
Date:
July, 2020
File:
PDF, 1.05 MB
2020