AIP Conference Proceedings [AIP Publishing THE 1ST...

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AIP Conference Proceedings [AIP Publishing THE 1ST INTERNATIONAL CONFERENCE ON PHYSICS AND APPLIED PHYSICS (THE 1ST ICP&AP) 2019: Fundamental and Innovative Research for Improving Competitive Dignified Nation and Industrial Revolution 4.0 - Medan, Indonesia (12–13 September 2019)] THE 1ST INTERNATIONAL CONFERENCE ON PHYSICS AND APPLIED PHYSICS (THE 1ST ICP&AP) 2019: Fundamental and Innovative Research for Improving Competitive Dignified Nation and Industrial Revolution 4.0 - A global argon and nitrogen plasma model for TaN and TiN reactive sputtering

Lu, Junqing
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Volume:
2221
Year:
2020
DOI:
10.1063/5.0003212
File:
PDF, 475 KB
2020
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