In SEM a New Method for Nondestructive Internal Microtomography of Semiconductors and IC
Liang, Zhuguan, Xia, Ling, Li, Yawen, Wang, Jian, Zhou, Kailin, Li, Ping, Xu, Xiaohua, Rau, E.I., Hu, WenguoVolume:
7
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600028518
Date:
August, 2001
File:
PDF, 963 KB
2001