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Electromechanical Tuning of Piecewise Stiffness and Damping for Long-Range and High-Precision Piezoelectric Ultrasonic Transducers
Robichaud, Alexandre, Deslandes, Dominic, Cicek, Paul-Vahe, Nabki, FredericYear:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3005917
File:
PDF, 2.41 MB
2020