SILICON DEPOSITION FROM DISILANE : EXPERIMENTAL STUDY AND...

SILICON DEPOSITION FROM DISILANE : EXPERIMENTAL STUDY AND MODELLING

GUEYE, M., SCHEID, E., TAURINES, P., DUVERNEUIL, P., BIELLE-DASPET, D., COUDERC, J. P.
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Volume:
02
Journal:
Le Journal de Physique IV
DOI:
10.1051/jp4:1991207
Date:
September, 1991
File:
PDF, 1.42 MB
1991
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