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[IEEE 2020 IEEE Silicon Nanoelectronics Workshop (SNW) - Honolulu, HI, USA (2020.6.13-2020.6.14)] 2020 IEEE Silicon Nanoelectronics Workshop (SNW) - Ferroelectric Tunnel Junction Optimization by Plasma-Enhanced Atomic Layer Deposition
Hur, Jae, Luo, Yuan-Chun, Wang, Panni, Tasneem, Nujhat, Khan, Asif Islam, Yu, ShimengYear:
2020
DOI:
10.1109/SNW50361.2020.9131649
File:
PDF, 1.81 MB
2020