Research of the Possibility to Obtain Structures with...

Nanotechnologies in Russia 2019 / 5 Vol. 14; Iss. 5-6

Research of the Possibility to Obtain Structures with Nanometer Layer Thicknesses and Sharp-Cut Interfaces between Them Using Ion-Beam and Reactive Ion-Beam Deposition Processes

Dedkova, A. A., Kireev, V. Yu., Myslivets, A. S., Rozel, P. A., Trifonov, A. Yu.
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Volume:
14
Journal:
Nanotechnologies in Russia
DOI:
10.1134/S1995078019030042
Date:
May, 2019
File:
PDF, 649 KB
2019
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