Temperature gradients in targets at low energy...

Surface and Coatings Technology 2020 / 05 Vol. 389

Temperature gradients in targets at low energy high-intensity ion implantation

Ryabchikov, A.I., Ananin, P.S., Bleykher, G.A., Ivanova, A.I., Koval, T.V., Modebadze, G.S.
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Volume:
389
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.125656
Date:
May, 2020
File:
PDF, 558 KB
2020
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