Optical Emission Spectroscopy Study of the Electron Temperature and Electron Density Dependence on the Pressure Chamber for the Carbon Deposition Produced by Argon Plasma Sputtering
Pambudi, D R S, Hanif, M A, Santjojo, D J D H, Padaga, M C, Masruroh,Volume:
833
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/833/1/012083
Date:
July, 2020
File:
PDF, 356 KB
2020